Photoelectrochemical methods for semiconductor device processing
โ Scribed by Paul A. Kohl; Derek B. Harris
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 538 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0013-4686
No coin nor oath required. For personal study only.
โฆ Synopsis
usefulness and capabilities of photoelectrochemical processing of III-V semiconductors is presented. Examples include the etching of small period gratings, the formation of integral lenses, the decomposition of small bandgap semiconductors, the etching of ptype semiconductors, and the photoinitiated deposition of metal. The transport of carriers in the semiconductor and reactivity of the surfaces is discussed.
๐ SIMILAR VOLUMES
We deal with the two-dimensional numerical solution of the Van Roosbroeck system, widely employed in modern semiconductor device simulation. Using the well-known Gummel's decoupled algorithm leads to the iterative solution of a nonlinear Poisson equation for the electric potential and two linearized