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4545851 Etching method for semiconductor devices

โœ Scribed by Tadakaz Takada

Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
160 KB
Volume
26
Category
Article
ISSN
0026-2714

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๐Ÿ“œ SIMILAR VOLUMES

Photoelectrochemical methods for semicon
Photoelectrochemical methods for semiconductor device processing
โœ Paul A. Kohl; Derek B. Harris ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 538 KB

usefulness and capabilities of photoelectrochemical processing of III-V semiconductors is presented. Examples include the etching of small period gratings, the formation of integral lenses, the decomposition of small bandgap semiconductors, the etching of ptype semiconductors, and the photoinitiated