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Photodeposition sputtering of titanium and TiN thin films

✍ Scribed by T.M Nenadović; T.P Mihać; Z.Lj Rakočević

Book ID
107864108
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
796 KB
Volume
218
Category
Article
ISSN
0040-6090

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Physical properties of reactive sputtered tin-nitride thin films
✍ Y Inoue; M Nomiya; O Takai 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 302 KB

We report on the physical properties of tin-nitride thin films deposited onto glass substrates by rf reactive sputtering. The crystal structure of the tin-nitride films is hexagonal and the lattice parameters are calculated from X-ray diffraction patterns as a = 0.369 nm and c = 0.529 nm. X-ray phot