Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films
β Scribed by J.S. Christensen; A.Yu. Kuznetsov; A.E. Gunnaes; B.G. Svensson; H.H. Radamson
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 266 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1369-8001
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