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Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

✍ Scribed by J.S. Christensen; A.Yu. Kuznetsov; A.E. Gunnaes; B.G. Svensson; H.H. Radamson


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
266 KB
Volume
9
Category
Article
ISSN
1369-8001

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