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Investigation of dislocations in composition graded and strain relaxed SiGe epitaxial layer by cathodeluminescence

✍ Scribed by Takamichi Sumitomo; Haruki Kita; Satoru Matsumoto

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 210 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.08.024

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