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Phosphorus and boron diffusion in silicon under equilibrium conditions

✍ Scribed by Christensen, J. S.; Radamson, H. H.; Kuznetsov, A. Yu.; Svensson, B. G.

Book ID: 121689885
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 219 KB
Volume: 82
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1566464

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