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On the anomalous diffusion of boron and phosphorus in silicon

✍ Scribed by Shaw, D.


Publisher
John Wiley and Sons
Year
1972
Tongue
English
Weight
87 KB
Volume
11
Category
Article
ISSN
0031-8965

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## Abstract We studied the simultaneous phosphorus and boron diffusion gettering (BDG) of iron in silicon by physical modeling. We present improvements to the previously used models for BDG and phosphorus diffusion gettering (PDG). We show that the improved model is suitable for analyzing the gette