𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Phase Separation and Formation of Silicides in Thin Films of Pd–W Alloys on Si

✍ Scribed by Rozhanskii, N. V. ;Lifshits, V. O.

Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
471 KB
Volume
125
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effects of stress on the formation and g
Effects of stress on the formation and growth of nickel silicides in Ni thin films on (0 0 1)Si
✍ L.W. Cheng; H.M. Lo; S.L. Cheng; L.J. Chen; C.J. Tsai 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 602 KB

Effects of stress on the formation and growth of nickel silicides in Ni thin films on (0 0 1)Si have been investigated. Compressive stress induced by backside SiO 2 film on the silicon substrate was found to retard significantly the formation of Ni 2 Si, NiSi and NiSi 2 on (0 0 1)Si. On the other ha