Phase interactions in TiNx(TiBx)-n-Si-n+-Si contacts and their thermal degradation due to rapid thermal annealing

✍ Scribed by N. S. Boltovets; V. N. Ivanov; R. V. Konakova; V. V. Milenin; D. I. Voitsikhovskii

• Book ID: 110134207
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 360 KB
• Volume: 48
• Category: Article
• ISSN: 1063-7842
• DOI: 10.1134/1.1568486