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Phase formation after high fluence implantation of Fe in AlN: a Mössbauer study

✍ Scribed by Michael Borowski; Agnès Traverse; Jean-Paul Eymery

Book ID
114168681
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
588 KB
Volume
122
Category
Article
ISSN
0168-583X

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Phase formation in Ti after high fluence
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✍ D. Manova; J.W. Gerlach; H. Neumann; W. Assmann; S. Mändl 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 377 KB

Nitrogen ion implantation in titanium using plasma immersion ion implantation (PIII) is investigated at a pulse voltage of 15 keV and elevated temperatures between 300 and 750 °C. Starting the implantation at room temperature leads to the parallel formation of TiN and Ti 2 N, as observed by X-ray di