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Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters

✍ Scribed by Zhongwen Li; Le Gu; Guangze Tang; Xinxin Ma; Mingren Sun; Liqin Wang


Book ID
107669053
Publisher
Nonferrous Metals Society of China
Year
2011
Tongue
English
Weight
681 KB
Volume
30
Category
Article
ISSN
1001-0521

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