✦ LIBER ✦
Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and tert-Butylimido-tris(diethylamido)-tantalum (TBTDET), and its Effect on Material Properties
✍ Scribed by Moon-Kyun Song; Shi-Woo Rhee
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 437 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0948-1907
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