✦ LIBER ✦
Study of phase transition and electrical resistivity of tantalum nitride films prepared by DC magnetron sputtering with OES detection system
✍ Scribed by Y.M Lu; R.J Weng; W.S Hwang; Y.S Yang
- Book ID
- 117226611
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 834 KB
- Volume
- 398-399
- Category
- Article
- ISSN
- 0040-6090
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