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Phase diffractive optical gratings on glass substrates by laser ablation

✍ Scribed by M.T. Flores-Arias; A. Castelo; C. Gomez-Reino; G.F. de la Fuente


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
450 KB
Volume
282
Category
Article
ISSN
0030-4018

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## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on