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Permittivity measurement of Ba0.5Sr0.5TiO3 ferroelectric thin films on multilayered silicon substrates

✍ Scribed by Zheyao Wang; Jianshe Liu; Litian Liu

Book ID
114630065
Publisher
IEEE
Year
2006
Tongue
English
Weight
295 KB
Volume
55
Category
Article
ISSN
0018-9456

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Interdigitated capacitors ha¨e been fabricated on ferroelectric thin films of Sr Ba TiO . These de¨ices ha¨e been characterized 0 .5 0 .5 3 at microwa¨e frequencies from 50 MHz to 20 GHz, and ha¨e a 3.4:1 tuning range o¨er a 1᎐40 V bias range. This is shown to originate from a relati¨e dielectric co