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Dielectric properties of planar structures based on ferroelectric Ba0.5Sr0.5TiO3films

✍ Scribed by B. M. Gol’tsman; V. V. Lemanov; A. I. Dedyk; S. F. Karmanenko; L. T. Ter-Martirosyan


Book ID
110123055
Publisher
SP MAIK Nauka/Interperiodica
Year
1997
Tongue
English
Weight
76 KB
Volume
23
Category
Article
ISSN
1063-7850

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Integration of high dielectric Ba0.5Sr0.
✍ Ch. Wenger; M. Albert; B. Adolphi; H. Heuer; J.W. Bartha; F. Schlenkrich 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 199 KB

The high-k dielectric material (Ba,Sr)TiO 3 has been intensively investigated for possible applications in dynamic random access memory circuits. During the BST deposition process in O 2 ambient, typically at 6501C, the diffusion of oxygen through the bottom electrode into the poly Si plug must be p