Performance of Tense Thin-Film Torsion Bar for Large Rotation and Low-Voltage Driving of Micromirror

✍ Scribed by Sasaki, M.; Yuki, S.; Hane, K.

• Book ID: 114570282
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 651 KB
• Volume: 13
• Category: Article
• ISSN: 1077-260X
• DOI: 10.1109/jstqe.2007.892078