Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

✍ Scribed by Sasaki, M.; Yuki, S.; Hane, K.

• Book ID: 119803029
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 867 KB
• Volume: 18
• Category: Article
• ISSN: 1041-1135
• DOI: 10.1109/lpt.2006.879587