Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si

✍ Scribed by Sasaki, M.; Fujishima, M.; Hane, K.; Miura, H.

• Book ID: 114570762
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 831 KB
• Volume: 15
• Category: Article
• ISSN: 1077-260X
• DOI: 10.1109/jstqe.2009.2022281