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PECVD of microcrystalline silicon carbon alloy thin films

✍ Scribed by Gautam Ganguly; S.C. De; Swati Ray; A.K. Barua

Book ID: 115987191
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 175 KB
Volume: 114
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(89)90732-1

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