Patterning sub-30-nm MOSFET gate with i-line lithography

✍ Scribed by Asano, K.; Yang-Kyu Choi; Tsu-Jae King; Chenming Hu

• Book ID: 114538668
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 84 KB
• Volume: 48
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.918251