𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia

✍ Scribed by Köllensperger, P A; Karl, W J; Ahmad, M M; Pike, W T; Green, M

Book ID
120280217
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
464 KB
Volume
22
Category
Article
ISSN
0960-1317

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Wet etching studies of silicon nitride t
Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition
✍ K.B. Sundaram; R.E. Sah; H. Baumann; K. Balachandran; R.M. Todi 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 194 KB

Silicon nitride films of various compositions have been deposited on silicon substrate by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR-PECVD) technique from mixtures of Ar, N and SiH as precursors. Film 2 4 composition and refractive index as a function of deposition p