✦ LIBER ✦
Residual stress improvement of platinum thin film in Au/Pt/Ti/p-GaAs ohmic contact by RF sputtering power
✍ Scribed by M. Parvizian; F. Rahimi-Ashtari; A. Goodarzi; B. Sabrloui; J. Sabaghzade; M.S. Zabihi
- Book ID
- 116245368
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 372 KB
- Volume
- 260
- Category
- Article
- ISSN
- 0169-4332
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