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Patterned Growth of Well-Aligned Carbon Nanotubes: A Soft-Lithographic Approach

โœ Scribed by Huang, Shaoming; Mau, Albert W. H.; Turney, Terence W.; White, Paul A.; Dai, Liming


Book ID
126946331
Publisher
American Chemical Society
Year
2000
Tongue
English
Weight
370 KB
Volume
104
Category
Article
ISSN
0022-3654

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We have achieved selective growth of high-purity carbon nanotubes (CNTs) on iron-deposited hole-patterns by thermal chemical vapor deposition (CVD) of acetylene gas. The vertically well-aligned CNTs were uniformly synthesized with good selectivity on hole-patterned silicon substrates. The CNTs indic