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Passivation of hydrogen terminated diamond surface conductive layer using hydrogenated amorphous carbon

✍ Scribed by Yamada, Takatoshi; Kojima, Aki; Sawabe, Atsuhito; Suzuki, Kazuhiro


Book ID
122063590
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
197 KB
Volume
13
Category
Article
ISSN
0925-9635

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In order to clarify the origin of high-conductivity layers HCL near the surfaces of hydrogenated diamond films, we have Ε½ . studied the relationship between HCL and surface structure in B-doped homoepitaxial 001 diamond films. Samples annealed in nitrogen environment at various temperatures have bee