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Passivation of GaAs FET's with PECVD silicon nitride films of different stress states

✍ Scribed by Chang, E.Y.; Cibuzar, G.T.; Pande, K.P.

Book ID: 114535542
Publisher: IEEE
Year: 1988
Tongue: English
Weight: 547 KB
Volume: 35
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.2573

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