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Mechanical stability of PECVD silicon nitride protective films over bondwires, bonds and bondpads during thermal stress

✍ Scribed by R.K. Ulrich; A.J. Phillips; D.H. Yi; W.D. Brown; S.S. Ang


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
679 KB
Volume
31
Category
Article
ISSN
0026-2714

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