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Passivation and depassivation of silicon dangling bonds at the Si/SiO2 interface by atomic hydrogen

✍ Scribed by Cartier, E.; Stathis, J. H.; Buchanan, D. A.


Book ID
126106689
Publisher
American Institute of Physics
Year
1993
Tongue
English
Weight
595 KB
Volume
63
Category
Article
ISSN
0003-6951

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