Particularities in the development characteristics of ion beam exposed positive polymer resists

✍ Scribed by Philippe David; Leonidas Karapiperis

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 350 KB
• Volume: 6
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(87)90060-8