✦ LIBER ✦
Methodology for determining the radiation efficiency and contrast characteristics in the case of electron and ion lithography, using positive polymer resists
✍ Scribed by K. Vutova; G. Mladenov
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 600 KB
- Volume
- 200
- Category
- Article
- ISSN
- 0040-6090
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