1. Introduction to the Semiconductor Industry. 2. Characteristics of Semiconductor Materials. 3. Device Technologies. 4. Silicon and Wafer Preparation. 5. Chemicals in Semiconductor Fabrication. 6. Contamination Controls in Wafer Fabs. 7. Metrology and Defect Inspection. 8. Gas Control in Pr
Particle Control for Semiconductor Manufacturing
โ Scribed by Donovan
- Publisher
- CRC Press
- Year
- 1990
- Tongue
- English
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Synopsis
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
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