Run-to-Run Control in Semiconductor Manufacturing

✍ Scribed by James Moyne, Enrique del Castillo, Arnon M. Hurwitz

• Publisher: CRC Press
• Year: 2000
• Tongue: English
• Leaves: 341
• Edition: 1
• Category: Library

✦ Synopsis

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.