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Parasitic effect on silicon MEMS resonator model parameters

✍ Scribed by Kazuaki Tanaka; Ryuji Kihara; Ana Sánchez-Amores; Josep Montserrat; Jaume Esteve

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
328 KB
Volume
84
Category
Article
ISSN
0167-9317

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