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Parameter optimization for film homogenization during ion assisted deposition

✍ Scribed by G Carter; DG Armour

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 434 KB
Volume: 36
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(86)90014-x

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