Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators

✍ Scribed by Minne, S. C.; Manalis, S. R.; Quate, C. F.

• Book ID: 121362551
• Publisher: American Institute of Physics
• Year: 1995
• Tongue: English
• Weight: 520 KB
• Volume: 67
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.115317