Modelling and analysis of MEMS sensor ba
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L. Kaabi; A. Kaabi; J. Sakly; F. AbdelMalek
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Article
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2007
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Elsevier Science
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English
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In this paper, we present a detailed study and analysis of piezoresistive effects on a membrane suspended in air based sensor. The variation of its capacitance under flow of stress or gas is investigated. The developed approach allows us to extract the material parameters in accurate way.