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Dimension and doping concentration based noise and performance optimization of a piezoresistive MEMS pressure sensor

✍ Scribed by Suja, K. J.; Kumar, G. S.; Nisanth, A.; Komaragiri, Rama

Book ID: 121540124
Publisher: Springer-Verlag
Year: 2014
Tongue: English
Weight: 714 KB
Volume: 21
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-014-2118-7

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