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[IEEE 2013 Annual International Conference on Emerging Research Areas (AICERA) - 2013 International Conference on Microelectronics, Communications and Renewable Energy (ICMiCR) - Kanjirapally, India (2013.06.4-2013.06.6)] 2013 Annual International Conference on Emerging Research Areas and 2013 International Conference on Microelectronics, Communications and Renewable Energy - Optimized design of a silicon based MEMS pressure sensor for wider range and better sensitivity

✍ Scribed by Suja, K J.; Gopal, Vidya; Komaragiri, Rama

Book ID: 121305152
Publisher: IEEE
Year: 2013
Weight: 641 KB
Category: Article
ISBN: 1467351482
DOI: 10.1109/AICERA-ICMiCR.2013.6575971

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