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p-type behavior in nominally undoped ZnO thin films by oxygen plasma growth

✍ Scribed by Zeng, Y. J.; Ye, Z. Z.; Xu, W. Z.; Lu, J. G.; He, H. P.; Zhu, L. P.; Zhao, B. H.; Che, Y.; Zhang, S. B.


Book ID
120297988
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
347 KB
Volume
88
Category
Article
ISSN
0003-6951

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## Abstract N‐doped p‐type ZnO thin films were grown by plasma molecular beam epitaxy (P‐MBE) on __c__‐plane sapphire (Al~2~O~3~) using radical NO as oxygen source and nitrogen dopant. The reproducible ZnO thin films have maximum net hole concentration (__N__~A~ – __N__~D~) of 1.2 Γ— 10^18^ cm^–3^ a