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p-n Junction revealed by Electrolytic Etching

✍ Scribed by BILLIG, E.; DOWD, J. J.


Book ID
109573956
Publisher
Nature Publishing Group
Year
1953
Tongue
English
Weight
143 KB
Volume
172
Category
Article
ISSN
0028-0836

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An investigation on pβ€”n junction etch st
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A p-n Junction etch stop has some advantages over a p+ etch stop and retams all the amsotroplc etchmg charactenstlcs, but it 1s still seldom used m practice This paper describes the current density versus voltage relationship, the etch-stop behavlour, the special technology process, the etch rate m