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Oxynitride gate dielectric grown in nitric oxide (NO): the effect of reoxidation on dielectric reliability of the active edge

โœ Scribed by B. Maiti; P. Tobin; Y. Okada; K. Reid; S. Ajuria; R. Hegde; V. Kaushik


Book ID
126744920
Publisher
IEEE
Year
1996
Tongue
English
Weight
377 KB
Volume
17
Category
Article
ISSN
0741-3106

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