Oxygen transport analysis in Czochralski silicon melt by considering the oxygen evaporation from the melt surface

✍ Scribed by Shinji Togawa; Xinming Huang; Koji Izunome; Kazutaka Terashima; Shigeyuki Kimura

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 527 KB
• Volume: 148
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)00655-5