2228. Quantitative calculation of phosphorus evaporation from the melt at pulling of silicon single crystals by the Czochralski method: S I Gashenko et al,Scient Rep of Scient Res and Develop Inst of Rare Metal Industry, No 51, 1974, 62–69 (in Russian)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 159 KB
• Volume: 26
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(76)90392-4