✦ LIBER ✦
Melt quenching technique for direct observation of oxygen transport in the Czochralski-grown Si process
✍ Scribed by Soroku Kawanishi; Shinji Togawa; Koji Izunome; Kazutaka Terashima; Shigeyuki Kimura
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 811 KB
- Volume
- 152
- Category
- Article
- ISSN
- 0022-0248
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