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Oxygen Ion Implantation Isolation Planar Process for AlGaN/GaN HEMTs

✍ Scribed by Shiu, Jin-Yu; Huang, Jui-Chien; Desmaris, Vincent; Chang, Chia-Ta; Lu, Chung-Yu; Kumakura, Kazuhide; Makimoto, Toshiki; Zirath, Herbert; Rorsman, Niklas; Chang, Edward Yi

Book ID: 120527759
Publisher: IEEE
Year: 2007
Tongue: English
Weight: 123 KB
Volume: 28
Category: Article
ISSN: 0741-3106
DOI: 10.1109/LED.2007.896904

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