High-Voltage Isolation Technique Using Fe Ion Implantation for Monolithic Integration of AlGaN/GaN Transistors

✍ Scribed by Umeda, Hidekazu; Takizawa, Toshiyuki; Anda, Yoshiharu; Ueda, Tetsuzo; Tanaka, Tsuyoshi

• Book ID: 120343810
• Publisher: IEEE
• Year: 2013
• Tongue: English
• Weight: 321 KB
• Volume: 60
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/TED.2012.2230264