✦ LIBER ✦

Oxygen ion implantation into both heavily doped n+- and p+-GaAs for isolation

✍ Scribed by Yamazaki Hajime; Ishida Satoru; Nagano Jin; Watanabe Kazuo; Ito Hiroshi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of n+-Layers in Undoped and In

✍ Chaldyshev, V. V. ;Dymova, N. N. ;Kunitsyn, A. E. ;Markov, A. V. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 202 KB 👁 2 views

Proton Implantation Induced Damage to He

✍ Thurzo, I. ;Pincík, E. ;Cicmanec, P. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 262 KB

On the ion implantation of the group VI

📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 157 KB

Diffusion of zinc into ion implanted iro

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 125 KB