Oxygen depth profiling in TiOxSiO2 prepared by sol-gel method using 16O(α, α)16O resonant backscattering

✍ Scribed by Y. Miyagawa; K. Saitoh; S. Nakao; T. Nonami; K. Kato; H. Taoda; S. Miyagawa

• Book ID: 114169672
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 515 KB
• Volume: 136-138
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00742-8