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Oxygen and carbon incorporation during infra-red assisted Czochralski growth of silicon crystals

✍ Scribed by U. Ekhult; T. Carlberg

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 795 KB
Volume: 98
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(89)90320-5

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