Oxygen partitioning analysis during Czochralski silicon crystal growth via a dopant marker and a simple transfer function modeling technique I. Rotation rate transients

✍ Scribed by C.T. Yen; W.A. Tiller

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 624 KB
• Volume: 109
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(91)90170-a